This afternoon I made up a green 10 AWG grounding cable and connected it to the vacuum system.

One end is tightly connected to the bottom flange of the vacuum chamber (photo 1). It is run along and up the table framing to the top of the cleanroom, where it exits into the overhead cable tray in the same location as the other power cables. It drops down from the top of the server rack all the way to the bottom, where the other end is connected to the lab's electrical ground in the rear of the 240 V UPS (photo 2).

The connections were confirmed to be secure, but continuity testing with an ohmmeter remains to be done to confirm that the chamber and tabletop are indeed grounded.