[Luke, Mary, Luis]

Particle Count Measurements:

• Pre-cleaning (8:40 am):
  • Zone 3:
    • 0.3 µm: 441
    • 0.5 µm: 44
    • 1.0 µm: 0
  • Zone 4:
    • 0.3 µm: 353
    • 0.5 µm: 176
    • 1.0 µm: 44

• Started Cleaning (3:16 pm)
• Finished Cleaning (4:10 pm)

• Post-cleaning (4:15 pm):
  • Zone 3:
    • 0.3 µm: 574
    • 0.5 µm: 265
    • 1.0 µm: 132
  • Zone 4:
    • 0.3 µm: 177
    • 0.5 µm: 44
    • 1.0 µm: 0