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Message ID: 223     Entry time: Mon Sep 11 16:02:42 2023
Author: Aiden 
Type: Update 
Category: VAC 
Subject: VAC System Heating Update 
The chamber has cooled down from bake 5 and I took the first set of data. The pressure measured during the RGA measurements reached 9.98 e-8 torr. The data shows that the chamber got dirtier, however this has been the case for every first scan after a bake so I assume there are still some more hydrocarbons to be vacuumed out and that the second scan will most likely give a better idea of where the chamber is at. After turning off the RGA the pressure immediately dropped to 7.4 e-8 torr and was still dropping.
Attachment 1: bake5_230911_ArO.png  340 kB  Uploaded Mon Sep 11 17:03:53 2023  | Show | Show all
Attachment 2: bake5_230911_ArC.png  350 kB  Uploaded Mon Sep 11 17:03:57 2023  | Show | Show all
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